Imprinted silicon-based nanophotonics

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DTU Mekanik

Danmarks Tekniske Universitet

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Titel:

Imprinted silicon-based nanophotonics

Type:

Journal articleJournal article

Person(er):

Forfatter: Borel, Peter Ingo (Cwisno: 11733)

Technical University of Denmark

Forfatter: Olsen, Brian Bilenberg (Cwisno: 14011)

Technical University of Denmark

Email:

Forfatter: Frandsen, Lars Hagedorn (Cwisno: 14402)

Technical University of Denmark

Email:

Forfatter: Nielsen, Theodor (Cwisno: 14010)

Technical University of Denmark

Email:

Forfatter: Fage-Pedersen, Jacob (Cwisno: 13429)

Technical University of Denmark

Forfatter: Lavrinenko, Andrei (Cwisno: 9383)

Technical University of Denmark

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Forfatter: Jensen, Jakob Søndergaard (Cwisno: 1060)

Technical University of Denmark

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Forfatter: Sigmund, Ole (Cwisno: 2278)

Technical University of Denmark

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Forfatter: Kristensen, Anders (Cwisno: 9525)

Technical University of Denmark

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Uddrag:

We demonstrate and optically characterize silicon-on-insulator based nanophotonic devices fabricated by nanoimprint lithography. In our demonstration, we have realized ordinary and topology-optimized photonic crystal waveguide structures. The topology-optimized structures require lateral pattern definition on a sub 30-nm scale in combination with a deep vertical silicon etch of the order of ~300 nm. The nanoimprint method offers a cost-efficient parallel fabrication process with state-of-the-art replication fidelity, comparable to direct electron beam writing.

Publiceret:

in journal: Optics Express (ISSN: 1094-4087) (DOI: http://dx.doi.org/10.1364/OE.15.001261), vol: 15, issue: 3, pages: 1261-1266, 2007

DOI:

10.1364/OE.15.001261

Se publikationen i DTU Orbit

Se publikationen i DTU Orbit

Nils Koppels Allé

Bygning 404

2800 Kgs. Lyngby

Tlf. 45 25 19 60

CVR-nr. 30060946

EAN-nr. 5798000430419